Cleanroom

Cleanroom class ISO 7 with a surface of 80 m2. Several instruments are available inside: Electron-beam lithography, Laser writer optical lithography, ellipsometry, UHV evaporators, Plasma ICP-RIE dry etching, Sputtering, wire bonder and optical microscope.

Technical Manager

Ángel López Muñoz

Scientific Officer

Eugenio Coronado Miralles

Group

RTMM